MatMeas RMS-1000P High-Temp Four-Point Probe Resistivity System — 1

Overview

RMS-1000P High-Temp Four-Point Probe Resistivity Measurement System is designed for semiconductor thin films and wafer characterization. As an experienced semiconductor test equipment factory, we provide precise sheet resistance and resistivity measurement using dual electrostatic method. The system handles silicon, germanium, GaAs, and ITO films with specialized spring-loaded probe fixture, supporting RT-1000°C testing in vacuum or controlled atmospheres for R&D laboratories and wafer manufacturers.

Specifications

ParameterValue
Measurement PrincipleIn-line four-probe method; dual electrical-measurement combination
Main MeasurementResistivity & sheet resistance
Range0.1 mΩ–100 MΩ
Max Furnace TemperatureUp to 1100°C
AtmosphereInert/oxidizing/reducing; vacuum; flowing atmosphere
Notable FeaturesOne-touch lift; thin-film-friendly probe; professional thin-film software
Temperature RangeRT-600°C / 1000°C
Temperature Control Accuracy±0.5°C
Temperature Control MethodPID precision control
Heating Rate0-10°C/min (typical 3°C/min)
Resistance Range0.1mΩ ~ 100MΩ
Resistivity Range1mΩ.cm ~ 10MΩ.cm
Sheet Resistance Range0.1mΩ ~ 100MΩ
Sample SpecificationThin film 15-30mm, d<4mm
Measurement MethodFour-point probe dual electrostatic
Electrode MaterialTungsten carbide / Platinum probes
Needle Insulation Resistance≥1000MΩ
Insulation Material99% alumina ceramic
Display10.1" color touchscreen
Data InterfaceUSB
Communication InterfaceLAN port
Data StorageTXT format
Dimensions (L×H×W)630×640×450mm
Weight42.5kg
Power Supply220V±10%, 50Hz, 2.6kW
StandardsASTM F84, GB/T1551-2009, GB/T1551-1995

Applications

  1. RMS-1000P is specialized for semiconductor thin film characterization including silicon wafers, germanium substrates, GaAs, InSb, GaAsAl, GaAsP, solid solution semiconductors, and ITO conductive glass. Critical for solar cell manufacturing, LED production, integrated circuit development, and transparent conductive film research.

More Details

Four-Probe Advantage
Classic in-line probe design helps avoid damage to thin-film samples.
Atmosphere Options
Supports inert/oxidizing/reducing atmospheres, vacuum, and flowing gas for temperature-dependent measurements.

FAQ

  • How does the RMS-1000P prevent catastrophic electrostatic discharge (ESD) from destroying semiconductor thin films?

    Standard 4-point probes often carry residual static charges that instantly punch through and vaporize nanometer-thick semiconductor layers during contact. The MatMeas RMS-1000P is engineered with a proprietary dual-electrostatic protection system, strictly neutralizing all charges before the probe touches the wafer, guaranteeing 100% non-destructive testing for delicate thin films.

  • Why do manual 4-point probes produce wild variations in sheet resistance data?

    Manual probes suffer from inconsistent contact pressure and micro-scratching, leading to wildly unstable resistance readings, especially on ultra-thin wafers. The RMS-1000P features a highly specialized, precision-engineered motorized fixture that guarantees absolute, repeatable contact force across an ultra-wide measurement range (0.1mΩ to 100MΩ).

  • What is the primary measurement principle of RMS-1000P?

    The RMS-1000P uses the classic in-line four-point probe method combined with a dual-configuration electrical measurement method (forward and reverse current sweeps). By applying a constant current through the outer two probes and measuring the voltage drop across the inner two probes, it effectively eliminates contact resistance and probe wire resistance. The dual-configuration technique mathematically corrects for geometry and boundary errors, ensuring extremely precise and repeatable sheet resistance and resistivity measurements of thin films and semiconductor wafers at high temperatures.

  • What sample shapes and forms are supported?

    The system supports standard sample geometries including solid blocks, circular thin-sheet discs, and rectangular bars with specialized test fixtures.

  • Does RMS-1000P comply with international laboratory standards?

    Yes, all measurements fully align with international norms such as ASTM, IEEE, and GB/T standards to deliver publishable, research-grade data.

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