MatMeas RMS-1000S High-Temp Semiconductor Resistivity System — 1

Overview

RMS-1000S High-Temp Semiconductor Material Resistivity Measurement System provides comprehensive solutions for bulk semiconductor characterization. As a dedicated semiconductor test system supplier, we offer precise four-wire measurement for silicon, germanium, GaAs, InSb, and compound semiconductors. The patented spring-loaded electrode fixture with heat dissipation design ensures stable contact and accurate temperature control from RT-1000°C, serving universities, research institutes, and semiconductor manufacturers worldwide.

Specifications

ParameterValue
Measurement PrincipleFour-wire resistivity measurement method
Main MeasurementResistance & resistivity vs temperature/time
Max Furnace TemperatureUp to 1100°C
Temperature Control Accuracy±0.5°C
AtmosphereInert/oxidizing/reducing; vacuum
Notable FeaturesSpring + self-weight contact; beginner-friendly software; fault diagnosis
Temperature RangeRT-600°C / 1000°C
Temperature Control MethodPID precision control (multi-stage)
Heating Rate0-10°C/min (typical 3°C/min)
Resistance Range0.1mΩ ~ 100MΩ
Resistivity Range1mΩ.cm ~ 10MΩ.cm
Sample SpecificationØ<20mm, d<5mm
Measurement MethodFour-wire method for semiconductors
Electrode MaterialPlatinum (upper/lower)
Patent No.2019204156568
Display10.1" color touchscreen
Data InterfaceUSB
Data StorageTXT format
Dimensions (L×H×W)630×640×450mm
Weight42.5kg
Power Supply220V±10%, 50Hz, 2.6kW
Working Environment5°C to +40°C
StandardsASTM standards

Applications

  1. RMS-1000S is designed for bulk semiconductor materials including silicon (Si), germanium (Ge), gallium arsenide (GaAs), indium antimonide (InSb), ternary compounds (GaAsAl, GaAsP), and solid solution semiconductors (Ge-Si, GaAs-GaP). Essential for PTC/NTC thermistor development, power semiconductor research, and temperature sensor manufacturing.

More Details

Stable High-Temperature Measurement
Spring + self-weight contact design reduces contact issues and data jumps.
Control & Diagnostics
Multi-stage PID control and fault diagnosis indicators help keep temperature and contacts stable.

FAQ

  • How does the RMS-1000s prevent rigid electrodes from shattering brittle semiconductor bulk materials?

    Generic high-temperature fixtures use rigid clamps that easily crush or crack brittle semiconductor ingots due to thermal expansion mismatch. The MatMeas RMS-1000s solves this by utilizing proprietary spring-loaded platinum electrodes. These dynamically absorb thermal stress while maintaining perfect 4-wire electrical contact, ensuring zero physical damage to expensive bulk samples.
  • Why is atmosphere control critical for measuring complex semiconductor resistivity?

    Semiconductor bulk materials are highly sensitive to oxygen and moisture; exposure during heating causes surface doping or oxidation that completely alters their intrinsic resistivity. The RMS-1000S integrates a fully sealable chamber supporting multiple atmospheric environments (vacuum, inert, reducing), allowing researchers to capture the absolute true intrinsic conductivity of complex semiconductors.
  • What is the primary measurement principle of RMS-1000S?

    RMS-1000S utilizes the four-wire resistance measurement method (Kelvin method) under varying temperature conditions. This eliminates lead and contact resistance to achieve high-precision resistivity measurements at the nΩ level.
  • What sample shapes and forms are supported?

    The system supports standard sample geometries including solid blocks, circular thin-sheet discs, and rectangular bars with specialized test fixtures.
  • Does RMS-1000S comply with international laboratory standards?

    Yes, all measurements fully align with international norms such as ASTM, IEEE, and GB/T standards to deliver publishable, research-grade data.

Academic Publications

JournalPaper TitlePublisher LinkDownload
Journal of the American Ceramic SocietyEnhanced electrical properties of Cr2O3 addition NBT-based high-temperature piezoelectric ceramicshttps://doi.org/10.1111/jace.18919Download